CAS No 7783 - 82 -6 Tungsten hexafluoride Utanga. Ibiranga Tungsten hexafluoride

Tungsten hexafluoride (WF₆) ni imiti ivanze na CAS nimero 7783-82-6. Ikoreshwa cyane mubikorwa bya semiconductor hamwe nubundi buryo buhanitse bukoreshwa kubera imiterere yihariye. Hano haribintu byingenzi biranga tungsten hexafluoride:

Ibyiza bifatika:
Kugaragara: Tungsten hexafluoride ni gaze itagira ibara mubushyuhe bwicyumba hamwe nigitutu.
Ingingo yo guteka: Hafi ya 12.8 ° C (55 ° F).
Ingingo yo gushonga: -59.2 ° C (-74,6 ° F).
Ubucucike: 6.23 g / cm³ kuri 25 ° C.
Gukemura: Ntibishobora gukoreshwa hamwe nibisanzwe byinshi ariko birashobora kubyitwaramo namazi cyangwa ubuhehere.
Ibikoresho bya shimi:
Igihagararo: Ihamye mubihe bisanzwe ariko ibora iyo ihuye nubushyuhe cyangwa ubuhehere.
Imyitozo ngororamubiri: Ifata cyane amazi hamwe nibikoresho byinshi kama, ikarekura fluoride ya hydrogène yubumara kandi yangiza (HF).
Ibyago byubuzima:
Uburozi: Tungsten hexafluoride ni uburozi bukabije no guhumeka kandi birashobora gutera ibibazo bikomeye byubuhumekero, harimo no kwangiza ibihaha.
Ruswa: Yangirika kuruhu n'amaso, kandi guhura bishobora gutera gutwikwa.
Ikoreshwa:
Inganda za Semiconductor: Zikoreshwa muburyo bwo gutumura imyuka ya chimique (CVD) mugushira firime ya tungsten muri microelectronics.
Metallurgie: Ikoreshwa mugukora ibibyimba bishingiye kuri tungsten.
Ubushakashatsi: Yakoreshejwe mubice bitandukanye byubushakashatsi kubera imiterere yihariye.
Mugihe ukoresha tungsten hexafluoride, burigihe ukoreshe ibikoresho bikingira umuntu (PPE), ukore ahantu hafite umwuka uhumeka neza cyangwa fume hood, kandi ukurikize protocole yumutekano kugirango wirinde guhumeka no guhura nuruhu. Menya neza ko ushobora kubona uburyo bwihutirwa hamwe n’ibikoresho byihutirwa.