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High Purity Disilane (Si2H6) Specialty Gases
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Contact usSpecifications
| Purity | 99.998 |
| Oxygen + Argon | ≤1 ppmv |
| Nitrogen | ≤1 ppmv |
| Carbon Monoxde | ≤1 ppmv |
| Carbon Dioxide | ≤1 ppmv |
| THC as CH4 | ≤1 ppmv |
| TCS ( Total Chlorosilanes ) | ≤ 0.2 ppmv |
| Higher silane | ≤ 50 ppmv |
| Silane | ≤ 200 ppmv |
| Water | ≤ 1 ppmv |
Technical Information
| Cylinder State @ 21.1°C | Liquid |
| Flammable Limits In Air | 2-98% |
| Auto Ignition Temperature (°C ) | -100 |
| Molecular Weight (g/mol) | 62.22 |
| Specific gravity (air =1) | 2.1 |
| Critical Temperature ( °C ) | 150.85 |
| Critical Pressure ( psig ) | 747 |
Description
Disilane is noncorrosive , colorless , gas which is spontaneously flammable in air. It decomposes slowly at room temperature to monosilane and hydrogen . It is compatible with hydrogen, argon, helium , and nitrogen , and is often shipped as a mixture with these gases , as well as in pure form.
Applications
Mainly used for miniaturization semiconductors manufacturing process in the high spedd and low temperature deposition of uniform thin films . The core applicitons such as process below 20nm node IC semiconductors , advanced memory chips ( DRAM/NAND Flash ), also used in gas mixture for HIT solar cells , LTPS TFT/LCD display panels , and LED .
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