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High Purity Fluoromethane Gas (CH3F) Fluorocarbon Gases
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Contact usSpecifications
| Purity , % | 99.99 | 99.995 |
| Oxygen | ≤20 ppbv | ≤5 ppmv |
| Nitrogen | ≤70 ppbv | ≤20 ppmv |
| Carbon Dioxide | ≤10 ppmv | |
| Carbon Monoxide | ≤10 ppmv | |
| Methane | ≤5 ppmv | |
| Water | ≤10 ppbv | ≤2 ppmv |
Technical Information
| Cylinder State @ 21.1°C | Liquid |
| Flammable Limits In Air | |
| Auto Ignition Temperature (°C ) | -18 |
| Molecular Weight (g/mol) | 34.03 |
| Specific gravity (air =1) | 1.18 |
| Critical Temperature ( °C ) | 45 |
| Critical Pressure ( psig ) |
Description
Methyl Fluoride is a non-toxic , liquefied and flammable gas at standard temperature and pressure .Fluoromethane, also known as methyl fluoride, Freon 41, Halocarbon-41 and HFC-41, is a non-toxic, liquefiable, and flammable gas at standard temperature and pressure. It is made of carbon, hydrogen, and fluorine. The name stems from the fact that it is methane (CH4) with a fluorine atom substituted for one of the hydrogen atoms. It is used in semiconductor manufacturing processes as an etching gas in plasma etch reactors.
Applications
In semiconductor manufacturing, methyl fluoride (R41) is used in plasma etching of silicon compound films.
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