High Purity Germane (GeH4) Specialty Gases
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Contact usSpecifications
| Purity , % | 99.999 |
| Oxygen + Argon | ≤0.5 ppmv |
| Nitrogen | ≤2.0 ppmv |
| Carbon Dioxide | ≤2.0 ppmv |
| Carbon Monoxide | ≤1.0 ppmv |
| Methane | ≤1.0 ppmv |
| Water | ≤1.0 ppmv |
| Chlorogermanes | ≤5.0 ppmv |
| Digermane* | ≤20.0 ppmv |
| Germoxanes | ≤5.0 ppmv |
| Hydrogen* | ≤50.0 ppmv |
| Trigermane | ≤1.0 ppmv |
Technical Information
| Cylinder State @ 21.1°C | Gas |
| Flammable Limits In Air | 0.5-100% |
| Auto Ignition Temperature (°C ) | 54.4 |
| Molecular Weight (g/mol) | 76.62 |
| Specific gravity (air =1) | 2.65 |
| Critical Temperature ( °C ) | 34.8 |
| Critical Pressure ( psig ) |
Description
Germane is the chemical compound with the formula GeH4, and the germanium analogue of methane. It is the simplest germanium hydride and one of the most useful compounds of germanium. Like the related compounds silane and methane, germane is tetrahedral. It burns in air to produce GeO2 and water. Germane is a group 14 hydride.
The gas decomposes near 600K (327°C; 620°F) to germanium and hydrogen. Because of its thermal lability, germane is used in the semiconductor industry for the epitaxial growth of germanium by MOVPE or chemical beam epitaxy.Organogermanium precursors (e.g. isobutylgermane, alkylgermanium trichlorides, and dimethylaminogermanium trichloride) have been examined as less hazardous liquid alternatives to germane for deposition of Ge-containing films by MOVPE.
Germane is a highly flammable, potentially pyrophoric,and a highly toxic gas.The LC50 for rats at 1 hour of exposure is 622 ppm.Inhalation or exposure may result in malaise, headache, dizziness, fainting, dyspnea, nausea, vomiting, kidney injury, and hemolytic effects.
Applications
Used for the deposition of epitaxial and amorphous silicon - germanium alloys , and as a component for PECVD of ( Si, Ge )O2 films with controllable refractive index for photonic .
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