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High Purity Molybdenum hexafluoride (MoF6) Specialty Gases

  • Formula MoF6
  • Formula weight 209.93 g/mol
  • CAS No. 7783-77-9
  • Appearance white crystals or colorless liquid
  • Density 3.50 g/cm3
  • Melting point 17.5 °C (63.5 °F; 290.6 K)
  • Boiling Point 34.0 °C (93.2 °F; 307.1 K)
  • Stablility to water hydrolyzes

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product description

Molybdenum hexafluoride, also molybdenum(VI) fluoride, is the inorganic compound with the formula MoF6. It is the highest fluoride of molybdenum. It is a colourless solid and melts just below room temperature and boils in 34 °C.It is one of the seventeen known binary hexafluorides.

Molybdenum hexafluoride has few uses. In the nuclear industry, MoF6 occurs as an impurity in uranium hexafluoride since molybdenum is a fission product of uranium.

The semiconductor industry constructs various integrated circuits through chemical vapor deposition of molybdenum hexafluoride.In some cases, the deposited molybdenum is an impurity in the intended tungsten hexafluoride. MoF6 can be removed by reduction of a WF6-MoF6 mixture with any of a number of elements including hydrogen iodide at moderately elevated temperature.

● Must only be kept in original packaging. Do not store in ceramic or glass.
● Store in cool, well ventilated area. Keep container tightly closed. Product reacts with
water. Take precautions to avoid contact with atmospheric moisture. Store under Argon.
● Avoid direct contact with the substance. Ensure there is exhaust ventilation of the area.
● Avoid the formation or spread of mists in the air. Only use in fume hood.

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