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High Purity Octafluorocyclobutane Gas (C4F8) Fluorocarbon Gases
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Contact usSpecifications
| Purity , % | 99.9 | 99.999 |
| Oxygen | ≤80 ppmv | ≤1.0 ppmv |
| Nitrogen | ≤300 ppmv | ≤3.0 ppmv |
| Carbon Dioxide | ≤50ppmv | ≤0.5ppmv |
| Carbon Monoxide | ≤30 ppmv | ≤0.5 ppmv |
| Methane | ≤30 ppmv | ≤0.5 ppmv |
| Water | ≤10 ppmv | ≤3.0 ppmv |
| Other Organics | ≤600 ppmv | ≤5.0 ppmv |
| Acidity as HCL | ≤1.0 ppmw | ≤0.1 ppmw |
Technical Information
| Cylinder State @ 21.1°C | Liquid |
| Flammable Limits In Air | Non-flammable |
| Auto Ignition Temperature (°C ) | - |
| Molecular Weight (g/mol) | 200.03 |
| Specific gravity (air =1) | 7.33 |
| Critical Temperature ( °C ) | 115.2 |
| Critical Pressure ( psig ) |
Description
Octafluorocyclobutane, or perfluorocyclobutane, C4F8, is an organofluorine compound which enjoys several niche applications. Octafluorocyclobutane is a colourless gas and shipped as a liquefied gas. It is the perfluorinated analogue of cyclobutane whereby all C–H bonds are replaced with C–F bonds.
In the production of semiconductor materials and devices, octafluorocyclobutane serves as a deposition gas and etchant.It has also been investigated as a refrigerant in specialised applications, as a replacement for ozone depleting chlorofluorocarbon refrigerants. Exploiting its volatility and chemical inertness, octafluorocyclobutane may be found in some aerosolized foods. It is listed by the Codex Alimentarius under number 946 (E946 for EU).
Applications
Perfluorocyclobutane (C4F8) is used in semiconductor manufacturing as plasma etching of silicon dioxide (SiO2) or silicon layers.
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